000 00645nam a2200181 4500
001 371697
090 _a371697
100 _a20040504u y0pory50 ba
101 _aeng
200 _aUsing electron beam lithography to create high-quality DOVDs
_ean introduction to electron beam lithography
_fTomas Tethal
461 _cAmsterdam
_d2004
_vIssue 5
_tKeesing's Journal of Documents
_x1571-0564
_pp.11-14
606 _aSEGURANÇA ÓPTICA DE DOCUMENTO
_9348404
606 _aLASER
_9329364
606 _aHOLOGRAMA
_9343992
700 _aTETHAL
_bTomas
_9348475